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Conference contributions
Effect of different chlorine sources during gate oxidation
Publication:
Effect of different chlorine sources during gate oxidation
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Date
1994
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vermeire, Bert
;
Mertens, Paul
;
Mac Geary, M. J.
;
Kenis, Karine
;
Heyns, Marc
;
Schaekers, Marc
;
Lubbers, A.
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Views
2196
since deposited on 2021-09-29
1
last month
1
last week
Acq. date: 2026-01-06
Citations