Publication:

Effect of different chlorine sources during gate oxidation

Date

1994
Proceedings Paper
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dc.contributor.authorVermeire, Bert
dc.contributor.authorMertens, Paul
dc.contributor.authorMac Geary, M. J.
dc.contributor.authorKenis, Karine
dc.contributor.authorHeyns, Marc
dc.contributor.authorSchaekers, Marc
dc.contributor.authorLubbers, A.
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorSchaekers, Marc
dc.date.accessioned2021-09-29T12:52:17Z
dc.date.available2021-09-29T12:52:17Z
dc.date.embargo9999-12-31
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/443
dc.source.beginpage143
dc.source.conferenceProceedings of the 2nd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS
dc.source.conferencedate19/09/1994
dc.source.conferencelocationBrugge belgium
dc.source.endpage146
dc.title

Effect of different chlorine sources during gate oxidation

dc.typeProceedings paper
dspace.entity.typePublication
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