Browsing by Author "Machida, Takahiro"
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Publication Comparison of back side chrome focus monitor to focus self-metrology of an immersion scanner
Proceedings paper2007, Metrology, Inspection and Process Control for Microlithography XXI, 25/02/2007, p.651805Publication Double patterning design split implementation and validation for the 32nm node
Proceedings paper2007, Design for Manufacturability through Design-Process Integration, 28/02/2007, p.652109