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Browsing by Author "Machillot, J."

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    Exploring W-Cu hybrid dual damascene metallization for future nodes

    Lei, W.
    ;
    Pethe, S.
    ;
    Hwang, S.
    ;
    Chen, F.
    ;
    Wu, Z.
    ;
    Machillot, J.
    ;
    Cockburn, A.
    ;
    Jansen, A.
    Proceedings paper
    2021, IEEE International Interconnect Technology Conference (IITC), JUL 06-09, 2021

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