Browsing by Author "Machillot, J."
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Publication Exploring W-Cu hybrid dual damascene metallization for future nodes
;Lei, W. ;Pethe, S. ;Hwang, S. ;Chen, F. ;Wu, Z. ;Machillot, J. ;Cockburn, A.Jansen, A.Proceedings paper2021, IEEE International Interconnect Technology Conference (IITC), JUL 06-09, 2021