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Browsing by Author "Madhivala, Viraj"

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    Area-selective ALD of Ru on nanometer-scale Cu lines through dimerization of amino-functionalized alkoxy silane passivation films

    Zyulkov, Ivan  
    ;
    Madhivala, Viraj
    ;
    Voronina, Ekaterina
    ;
    Snelgrove, Matthew
    ;
    Bogan, Justin
    Journal article
    2020, ACS Applied Materials & Interfaces, (12) 4, p.4678-4688

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