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Browsing by Author "Maerhoudt,"

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    Development of a contact edge roughness measurement methodology and its sources in 193nm patterning

    Vandeweyer, Tom  
    ;
    Maerhoudt,
    ;
    de Marneffe, Jean-Francois  
    ;
    Dirksen, Peter
    Proceedings paper
    2003, Interface '03, 22/09/2003

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