Browsing by Author "Maes, A."
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Publication Evaluation of megasonic cleaning processes
Proceedings paper2004, Cleaning Technology in Semiconductor Device Manufacturing VIII. Proceedings of the International Symposium, 13/10/2003, p.161-167Publication Introduction of high-k materials into wet processing, analysis and behavior
Proceedings paper2003, Ultra Clean Processing of Silicon Surfaces 2002 - UCPSS, 16/09/2002, p.19-23