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Conference contributions
Introduction of high-k materials into wet processing, analysis and behavior
Publication:
Introduction of high-k materials into wet processing, analysis and behavior
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Date
2003
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Onsia, Bart
;
Hellin, David
;
Claes, Martine
;
Maes, A.
;
De Gendt, Stefan
;
Heyns, Marc
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Acq. date: 2025-12-11
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since deposited on 2021-10-15
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Downloads
1
since deposited on 2021-10-15
Acq. date: 2025-12-11
Views
1933
since deposited on 2021-10-15
2
last month
Acq. date: 2025-12-11
Citations