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Browsing by Author "Magnee, R."

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    Ion induced oxidation of silicon by oxygen and argon bombardment in combination with oxygen flooding

    De Witte, Hilde
    ;
    Conard, Thierry  
    ;
    Gouttebaron, R.
    ;
    Magnee, R.
    ;
    Caudano, R.
    ;
    Vandervorst, Wilfried  
    Oral presentation
    1998, SIMS Europe Workshop; 4-6 October 1998; Munster, Germany.

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