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Browsing by Author "Malik, Irfan"

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    Detection of split design-related weak points in double patterning using PQW and bright-field defect inspection

    Van Den Heuvel, Dieter  
    ;
    Cheng, Shaunee
    ;
    Leray, Philippe  
    ;
    Wiaux, Vincent  
    ;
    Maenhoudt, Mireille
    Proceedings paper
    2008, 5th International Symposium on Immersion Lithography Extensions, 22/09/2008

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