Publication:
Detection of split design-related weak points in double patterning using PQW and bright-field defect inspection
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1937 since deposited on 2021-10-17
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Acq. date: 2026-08-04
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Views
1937 since deposited on 2021-10-17
2last month
1last week
Acq. date: 2026-08-04
Citations