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Browsing by Author "Manke, C."

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    Improving CMOS performance by AVD® grown high-k dielectrics and advanced metal electrodes

    Weber, U.
    ;
    Boissière, O.
    ;
    Lindner, J.
    ;
    Schuhmacher, M.
    ;
    Lehnen, Peer
    ;
    Manke, C.
    ;
    Van Elshocht, Sven  
    Proceedings paper
    2005, Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS: New Materials, Processes, and Equipment, 15/05/2005, p.293

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