Publication:
Improving CMOS performance by AVD® grown high-k dielectrics and advanced metal electrodes
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1962 since deposited on 2021-10-16
2last month
Acq. date: 2026-01-09
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Metrics
Views
1962 since deposited on 2021-10-16
2last month
Acq. date: 2026-01-09
Citations