Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Mankelevich, Yu"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Effect of porosity and pore size on dielectric constant of organosilicate based low-k films : an analytical approach

    Palov, A
    ;
    Voronina, E
    ;
    Rakhimova, T
    ;
    Lopaev, D
    ;
    Zyryanov, Sergey M.
    ;
    Mankelevich, Yu
    Journal article
    2016, Journal of Vacuum Science and Technology B, (34) 4, p.41205

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings