Browsing by Author "Mankelevich, Yu"
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Publication Effect of porosity and pore size on dielectric constant of organosilicate based low-k films : an analytical approach
;Palov, A ;Voronina, E ;Rakhimova, T ;Lopaev, D ;Zyryanov, Sergey M.Mankelevich, YuJournal article2016, Journal of Vacuum Science and Technology B, (34) 4, p.41205