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Browsing by Author "Mankelevich, Yu. A."

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    Charging of submicron structures during silicon dioxide etching in one

    Palov, P.A.
    ;
    Mankelevich, Yu. A.
    ;
    Rakhimova, T. V.
    ;
    Shamiryan, Denis
    Journal article
    2010, Plasma Physics Reports, (36) 10, p.891-901

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