Browsing by Author "Marcuccilli, Gino"
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Publication Detection of split design-related weak points in double patterning using PQW and bright-field defect inspection
Proceedings paper2008, 5th International Symposium on Immersion Lithography Extensions, 22/09/2008Publication Investigation of the performance of state-of-the-art defect inspection tools within EUV lithography
Proceedings paper2012, Metrology, Inspection, and Process Control for Microlithography XXVI, 12/02/2012, p.83240LPublication Quantitative pattern collapse metrology for 193nm immersion lithography
Journal article2011, Journal of Photopolymer Science and Technology, (24) 2, p.233-238