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    Phase-shift photomask designed by scalar diffractiontheory

    Cirino, Giuseppe
    ;
    Mansano, Ronaldo
    ;
    Verdonck, Patrick  
    ;
    Cescato, Lucila
    ;
    Marega, E.
    Proceedings paper
    2009-09, 24th Symposium on Microelectronics Technology and Devices - SBMicro, 31/08/2009, p.487-497

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