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Browsing by Author "Mareum Khan, Muhaimin"

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    Plasma Oxidation of Patterned Mo Nanowires for Precise and Uniform Dry Etching

    Erofeev, Ivan
    ;
    Mareum Khan, Muhaimin
    ;
    Aabdin, Zainul
    ;
    Ray Chowdhuri, Angshuman
    ;
    Pacco, Antoine  
    Proceedings paper
    2023-08, 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2023), September 2023, p.346-350

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