Publication:

Plasma Oxidation of Patterned Mo Nanowires for Precise and Uniform Dry Etching

Date

2023-08
Proceedings Paper
https://doi.org/10.4028/p-B71ad1
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Accepted version 3.08 MB

Author(s)

Erofeev, Ivan
;
Mareum Khan, Muhaimin
;
Aabdin, Zainul
;
Ray Chowdhuri, Angshuman
;
Pacco, Antoine  
;
Philipsen, Harold  
;
Holsteyns, Frank  
;
Mirsaidov, Utkur

Journal

Solid State Phenomena Vol. 346

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1006 since deposited on 2023-09-06
Acq. date: 2025-10-23

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1006 since deposited on 2023-09-06
Acq. date: 2025-10-23

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