Publication:

Plasma Oxidation of Patterned Mo Nanowires for Precise and Uniform Dry Etching

Date

2023-08
Proceedings Paper
https://doi.org/10.4028/p-B71ad1
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dc.contributor.authorErofeev, Ivan
dc.contributor.authorMareum Khan, Muhaimin
dc.contributor.authorAabdin, Zainul
dc.contributor.authorRay Chowdhuri, Angshuman
dc.contributor.authorPacco, Antoine
dc.contributor.authorPhilipsen, Harold
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorMirsaidov, Utkur
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorPhilipsen, Harold
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.orcidimecPacco, Antoine::0000-0001-6330-5053
dc.contributor.orcidimecPhilipsen, Harold::0000-0002-5029-1104
dc.contributor.orcidimecHolsteyns, Frank::0009-0002-2123-452X
dc.date.accessioned2024-02-05T12:54:11Z
dc.date.available2023-09-06T06:53:26Z
dc.date.available2024-02-05T12:54:11Z
dc.date.embargo9999-12-31
dc.date.issued2023-08
dc.identifier.doihttps://doi.org/10.4028/p-B71ad1
dc.identifier.issn1012-0394
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42471
dc.publisherScientific.Net
dc.source.beginpage346
dc.source.conference16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2023)
dc.source.conferencedateSeptember 2023
dc.source.conferencelocationBrugge
dc.source.endpage350
dc.source.journalSolid State Phenomena Vol. 346
dc.source.numberofpages5
dc.subject.disciplineMaterials science
dc.subject.keywordsplasma oxidation
dc.subject.keywordsmetal etching
dc.subject.keywordsatomic layer etching
dc.title

Plasma Oxidation of Patterned Mo Nanowires for Precise and Uniform Dry Etching

dc.typeProceedings paper
dspace.entity.typePublication
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