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Browsing by Author "Marigo, Eloi"

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    MULTI-FREQUENCY IMAGING WITH A CMOS COMPATIBLE SCANDIUM DOPED ALUMINUM NITRIDE PMUT ARRAY

    Billen, Margo  
    ;
    Gao, Hang  
    ;
    Marigo, Eloi
    ;
    Soundara-Pandian, Mohan
    ;
    Tabruyn, Dries  
    ;
    Helin, Philippe  
    Proceedings paper
    2021, 34th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), JAN 25-29, 2021, p.907-910

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