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MULTI-FREQUENCY IMAGING WITH A CMOS COMPATIBLE SCANDIUM DOPED ALUMINUM NITRIDE PMUT ARRAY
Publication:
MULTI-FREQUENCY IMAGING WITH A CMOS COMPATIBLE SCANDIUM DOPED ALUMINUM NITRIDE PMUT ARRAY
Date
2021
Proceedings Paper
https://doi.org/10.1109/MEMS51782.2021.9375183
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Billen, Margo
;
Gao, Hang
;
Marigo, Eloi
;
Soundara-Pandian, Mohan
;
Tabruyn, Dries
;
Helin, Philippe
;
Rochus, Veronique
Journal
na
Abstract
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1913
since deposited on 2022-03-16
Acq. date: 2025-10-27
Citations
Metrics
Views
1913
since deposited on 2022-03-16
Acq. date: 2025-10-27
Citations