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Browsing by Author "Marsik, P."

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    Porogen residues detection in optical properties of low-k dielectrics cured by ultraviolet radiation

    Marsik, P.
    ;
    Verdonck, Patrick  
    ;
    De Roest, David  
    ;
    Baklanov, Mikhaïl
    Journal article
    2010, Thin Solid Films, (518) 15, p.4266-4272

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