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Articles
Porogen residues detection in optical properties of low-k dielectrics cured by ultraviolet radiation
Publication:
Porogen residues detection in optical properties of low-k dielectrics cured by ultraviolet radiation
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Date
2010
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Marsik, P.
;
Verdonck, Patrick
;
De Roest, David
;
Baklanov, Mikhaïl
Journal
Thin Solid Films
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1818
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Acq. date: 2025-12-15
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Views
1818
since deposited on 2021-10-18
2
last month
Acq. date: 2025-12-15
Citations