Porogen residues detection in optical properties of low-k dielectrics cured by ultraviolet radiation

dc.contributor.author	Marsik, P.
dc.contributor.author	Verdonck, Patrick
dc.contributor.author	De Roest, David
dc.contributor.author	Baklanov, Mikhaïl
dc.contributor.imecauthor	Verdonck, Patrick
dc.contributor.imecauthor	De Roest, David
dc.contributor.orcidimec	Verdonck, Patrick::0000-0003-2454-0602
dc.date.accessioned	2021-10-18T18:52:37Z
dc.date.available	2021-10-18T18:52:37Z
dc.date.issued	2010
dc.identifier.issn	0040-6090
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/17590
dc.source.beginpage	4266
dc.source.endpage	4272
dc.source.issue	15
dc.source.journal	Thin Solid Films
dc.source.volume	518
dc.title	Porogen residues detection in optical properties of low-k dielectrics cured by ultraviolet radiation
dc.type	Journal article
dspace.entity.type	Publication
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