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Browsing by Author "Martin, P."

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    Heated implantation with amorphous carbon CMOS mask for scaled FinFETs

    Togo, Mitsuhiro
    ;
    Sasaki, Yuichiro
    ;
    Zschaetzsch, Gerd
    ;
    Boccardi, Guillaume  
    Proceedings paper
    2013, Symposium on VLSI Technology, 11/06/2013, p.T196-T197

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