Browsing by Author "Marx, Matthias"
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Publication Demonstration of High-quality GaN Epitaxy on 200 mm Engineered Substrates for Vertical Power Device Fabrication
; ; ; ; ; ; Marx, MatthiasProceedings paper2021, 2021 International Conference on Compound Semiconductor Manufacturing Technology (CS Mantech), 24/05/2021Publication Development and analysis of thick GaN drift layers on 200 mm CTE-matched substrate for vertical device processing
Journal article2023, SCIENTIFIC REPORTS, (13) N/, p.Art. 15931