Browsing by Author "Marzook, Taisir"
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Publication Directed self-assembly process integration – fin patterning
Proceedings paper2015, Advances in Patterning Materials and Processes XXXII, 22/02/2015, p.94250RPublication Etch challenges for chemo-expitaxy Directed Self-Assembly (DSA) LiNe flow in Fin patterning
Meeting abstract2016, Plasma Etch and Strip in Microtechnology - PESM, 9/05/2016Publication Implementation of surface energy modification in graphoepitaxy directed self-assembly for hole multiplication
Journal article2015, Journal of Vacuum Science and Technology B, (33) 6, p.06F301Publication Toward sub-20nm pitch Fin patterning and integration with DSA
Proceedings paper2016, Advances in Patterning Materials and Processes XXXIII, 22/02/2016, p.97790R