Browsing by Author "Masaoku, Toru"
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Publication Pre-Epi Clean of SiGe 20%: GeH4 and HCl vs H2-based in-situ cleaning
Meeting abstract2018-05, 9th International SiGe Technology and Device Meeting / 11th International Conference on Silicon Epitaxy and Heterostructures, 27/05/2018, p.193-194