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Browsing by Author "Maslow, M. J."

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    Towards high NA patterning readiness: Materials, processes and etch transfer for P24 Line Space

    Santaclara, J. G.
    ;
    Maslow, M. J.
    ;
    Thiam, Arame  
    ;
    Franke, Joern-Holger
    ;
    Schleicher, Filip  
    Proceedings paper
    2021, International Conference on Extreme Ultraviolet Lithography, SEP 27-OCT 01, 2021, p.118540A

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