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Browsing by Author "Massi, Marcos"

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    Investigations of capacitively-coupled plasmas by electrostatic probe technique

    Cirino, Giuseppe
    ;
    Castro, Raul
    ;
    Pisani, Marcelo
    ;
    Verdonck, Patrick  
    ;
    Mansano, Ronaldo
    Proceedings paper
    2015, 30th Symposium on Microelectronics Technology and Devices - SBMicro, 31/08/2015, p.1-4

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