Browsing by Author "Masuda, Seiya"
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Publication Optimization of an advanced positive DUV photoresist towards 150 nm and beyond
Oral presentation1999, MNE'99 - Micro and Nano Engineering ConferencePublication Optimization of an advanced positive tone DUV photoresist towards 150nm and beyond
Journal article2000, Microelectronic Engineering, (53) 1_4, p.443-447