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Browsing by Author "Matero, R."

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    Sr-Cp precursor based ALD SrTiO3 for capacitor applications

    Maes, Jan  
    ;
    Blomberg, T.
    ;
    Matero, R.
    ;
    Tuominen, M.
    ;
    Swerts, Johan  
    ;
    Menou, Nicolas
    ;
    Wang, Xin Peng
    Proceedings paper
    2008, 8th International Conference on Atomic Layer Deposition - ALD, 29/06/2008

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