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Browsing by Author "Mathew, Bobin"

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    Unbiased roughness measurements for 0.55NA EUV material setup

    Mathew, Bobin
    ;
    Arad, Shahar
    ;
    Brand, Omri
    ;
    Frank, Tal
    ;
    Alkoken, Ran
    ;
    Shilo, Yael
    ;
    Melamed, Yarden
    Proceedings paper
    2023, Conference on Metrology, Inspection, and Process Control XXXVII, FEB 27-MAR 02, 2023, p.Art. 1249607

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