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Browsing by Author "Mathukrishnan, S."

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    Silicide yield improvement with NiPtSi formation by laser anneal for advanced low power platform CMOS technology

    Ortolland, Claude
    ;
    Rosseel, Erik  
    ;
    Horiguchi, Naoto  
    ;
    Kerner, Christoph  
    ;
    Mertens, Sofie  
    Proceedings paper
    2009, IEEE International Electron Devices Meeting - IEDM, 7/12/2009, p.23-26

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