Publication:

Silicide yield improvement with NiPtSi formation by laser anneal for advanced low power platform CMOS technology

Date

2009
Proceedings Paper
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Author(s)

Ortolland, Claude
;
Rosseel, Erik  
;
Horiguchi, Naoto  
;
Kerner, Christoph  
;
Mertens, Sofie  
;
Kittl, Jorge
;
Verleysen, Eveline
;
Bender, Hugo  
;
Vandervorst, Wilfried  
;
Lauwers, Anne  
;
Absil, Philippe  
;
Biesemans, Serge  
;
Mathukrishnan, S.
;
Srinivasan, S.
;
Mayur, A.J.
;
Schreutelkamp, Rob
;
Hoffmann, Thomas Y.

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