Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Matovu, J.B."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Fundamental investigation of chemical mechanical polishing of GaAs in ailica dispersions: Material removal and arsenic trihydride formation pathways

    Ong, Patrick  
    ;
    Matovu, J.B.
    ;
    Leunissen, Peter
    ;
    Krishnan, Sitaraman
    ;
    Babu, S.V.
    Journal article
    2013, ECS Journal of Solid State Science and Technology, (2) 11, p.P432-P439

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings