Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Matsumoto, Yasuhiro"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Study of porogen removal by HWCVD for the fabrication of advanced low-k films

    Godavarthi, Srinivas
    ;
    Wang, Cong
    ;
    Verdonck, Patrick  
    ;
    Matsumoto, Yasuhiro
    ;
    Koudriavtsev, I
    Meeting abstract
    2012, 7th International Conference on Hot- Wire Chemical Vapor deposition - Cat-CVD, 8/10/2012, p.T5-7-T5-7

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings