Browsing by Author "Maxey, Kirby"
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Publication Advanced EUV patterning of 2D TMDs for CMOS integration
;Faramarzi, Vina ;de Poortere, Etienne ;Venugopalan, Syam ParayilWoltgens, PieterProceedings paper2024, Conference on Novel Patterning Technologies, FEB 26-29, 2024, p.129660I