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Browsing by Author "Mayur, Abhilash"

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    Comprehensive study of Ga Activation in Si, SiGe and Ge and 5 x 10-10 $Xcm2 contact resistivity achieved on Ga doped Ge using nanosecond laser activation

    Wang, Linlin
    ;
    Yu, Hao  
    ;
    Schaekers, Marc  
    ;
    Everaert, Jean-Luc
    ;
    Franquet, Alexis  
    ;
    Douhard, Bastien  
    Proceedings paper
    2017, IEEE International Electron Devices Meeting - IEDM, 2/12/2017, p.550-552
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    Sub-10-9 Ohm.cm2 contact resistivity on p-SiGe achieved by Ga doping and nanosecond laser activation

    Everaert, Jean-Luc
    ;
    Schaekers, Marc  
    ;
    Yu, Hao  
    ;
    Wang, Linlin
    ;
    Hikavyy, Andriy  
    ;
    Date, Lucien  
    Proceedings paper
    2017, Symposium on VLSI Technology, 5/06/2017, p.214-215

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