Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Mc Intosh, R."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Impact of sub-melt laser annealing on Si1-xGex source/drain defectivity

    Rosseel, Erik  
    ;
    Lu, J.P
    ;
    Hikavyy, Andriy  
    ;
    Verheyen, Peter  
    ;
    Hoffmann, Thomas Y.
    ;
    Richard, Olivier  
    Proceedings paper
    2007, 15th IEEE Conference on Advanced Thermal Processing of Semiconductors - RTP, 2/10/2007, p.307-315

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings