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Browsing by Author "McAfferty, D."

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    Status and critical challenges for 157nm lithography

    Ronse, Kurt  
    ;
    De Bisschop, Peter  
    ;
    Goethals, Mieke
    ;
    Hermans, Jan  
    ;
    Jonckheere, Rik  
    ;
    Light, Scott
    Journal article
    2004, Microelectronic Engineering, 73-74, p.5-10

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