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Browsing by Author "McIntyre, Paul C."

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    Publication

    Atomic layer deposition of hafnium oxide on Ge and GaAs substrates: precursors and surface preparation

    Delabie, Annelies  
    ;
    Brunco, David
    ;
    Conard, Thierry  
    ;
    Favia, Paola  
    ;
    Bender, Hugo  
    ;
    Franquet, Alexis  
    Journal article
    2008, Journal of the Electrochemical Society, (155) 12, p.H937-H944

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