Browsing by Author "McMurray, J. S."
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Publication Epitaxial staircase structure for the calibration of electrical characterisation techniques
Proceedings paper1997, Proceedings 4th Int. Worksh. on the Measurement, Characterization and Modelling of Ultra-Shallow Doping Profiles in Semiconducto, 6/04/1997, p.30.1-30.1Publication Epitaxial staircase structure for the calibration of electrical characterization techniques
Journal article1998, Journal of Vacuum Science and Technology B, (16) 1, p.394-400