Publication:

Epitaxial staircase structure for the calibration of electrical characterization techniques

Date

1998

Journal article

Simple item page Full metadata Statistics

Files

2309.pdf 138.19 KB

Author(s)

Clarysse, Trudo

;

;

;

Trenkler, Thomas

;

Vandervorst, Wilfried

;

McMurray, J. S.

;

;

Williams, C. C.

;

;

Journal

Journal of Vacuum Science and Technology B

Statistics

1959 since deposited on 2021-09-30

5last month

Acq. date: 2026-01-26