Publication:

Epitaxial staircase structure for the calibration of electrical characterization techniques

Date

1998
Journal article
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

2309.pdf 138.19 KB

Author(s)

Clarysse, Trudo
;
Caymax, Matty  
;
De Wolf, Peter
;
Trenkler, Thomas
;
Vandervorst, Wilfried  
;
McMurray, J. S.
;
Kim, J.
;
Williams, C. C.
;
Clark, J. G.
;
Neubauer, G.

Journal

Journal of Vacuum Science and Technology B

Abstract

Description

Statistics

Views

1960 since deposited on 2021-09-30
1last month
Acq. date: 2026-02-24

Citations

Statistics

Views

1960 since deposited on 2021-09-30
1last month
Acq. date: 2026-02-24

Citations