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Articles
Epitaxial staircase structure for the calibration of electrical characterization techniques
Publication:
Epitaxial staircase structure for the calibration of electrical characterization techniques
Date
1998
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Clarysse, Trudo
;
Caymax, Matty
;
De Wolf, Peter
;
Trenkler, Thomas
;
Vandervorst, Wilfried
;
McMurray, J. S.
;
Kim, J.
;
Williams, C. C.
;
Clark, J. G.
;
Neubauer, G.
Journal
Journal of Vacuum Science and Technology B
Abstract
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1951
since deposited on 2021-09-30
Acq. date: 2025-10-23
Citations
Metrics
Views
1951
since deposited on 2021-09-30
Acq. date: 2025-10-23
Citations