Publication:

Epitaxial staircase structure for the calibration of electrical characterization techniques

Date

1998
Journal article
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dc.contributor.authorClarysse, Trudo
dc.contributor.authorCaymax, Matty
dc.contributor.authorDe Wolf, Peter
dc.contributor.authorTrenkler, Thomas
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorMcMurray, J. S.
dc.contributor.authorKim, J.
dc.contributor.authorWilliams, C. C.
dc.contributor.authorClark, J. G.
dc.contributor.authorNeubauer, G.
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-09-30T11:34:51Z
dc.date.available2021-09-30T11:34:51Z
dc.date.embargo9999-12-31
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2451
dc.source.beginpage394
dc.source.endpage400
dc.source.issue1
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.volume16
dc.title

Epitaxial staircase structure for the calibration of electrical characterization techniques

dc.typeJournal article
dspace.entity.typePublication
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