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Browsing by Author "Meerschaut, Johan"

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    Pore sealing of porous low-k films by SAMs for ALD

    Armini, Silvia  
    ;
    Verdonck, Patrick  
    ;
    Loyo Prado, Jana  
    ;
    Krishtab, Mikhail  
    ;
    Swerts, Johan  
    Oral presentation
    2011, ALD for Nanotechnology Applications

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