Publication:

Pore sealing of porous low-k films by SAMs for ALD

Date

2011

Presentation

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Author(s)

;

Verdonck, Patrick

;

Loyo Prado, Jana

;

Krishtab, Mikhail

;

;

;

Meerschaut, Johan

;

;

Adelmann, Christoph

;

;

Van Elshocht, Sven

;

Delabie, Annelies

;

Leunissen, Peter

;

Baklanov, Mikhaïl

Metrics

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Acq. date: 2026-01-06