Publication:

Pore sealing of porous low-k films by SAMs for ALD

Date

2011
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dc.contributor.authorArmini, Silvia
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorLoyo Prado, Jana
dc.contributor.authorKrishtab, Mikhail
dc.contributor.authorSwerts, Johan
dc.contributor.authorCiofi, Ivan
dc.contributor.authorMeerschaut, Johan
dc.contributor.authorKim, Tae-Gon
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorLe Quoc, Toan
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorDelabie, Annelies
dc.contributor.authorLeunissen, Peter
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorLoyo Prado, Jana
dc.contributor.imecauthorKrishtab, Mikhail
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned2021-10-19T12:29:39Z
dc.date.available2021-10-19T12:29:39Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18490
dc.identifier.urlhttp://www2.imec.be/be_en/education/conferences/ald-workshop.html
dc.source.conferenceALD for Nanotechnology Applications
dc.source.conferencedate28/11/2011
dc.source.conferencelocationLeuven Belgium
dc.title

Pore sealing of porous low-k films by SAMs for ALD

dc.typeOral presentation
dspace.entity.typePublication
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