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Browsing by Author "Megens, Henry"

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    Double patterning for 32-nm and below: an update

    Finders, Jo
    ;
    Dusa, Mircea  
    ;
    Vleeming, Bert
    ;
    Hepp, Birgitt
    ;
    Megens, Henry
    ;
    Maenhoudt, Mireille
    Proceedings paper
    2008, Optical Microlithography XXI, 24/02/2008, p.692408

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